Semiconductor Industry

Semiconductor Industry

Introduce

HSS magnetic bearing turbo blowers and compressors and magnetic bearing vacuum pumps are mainly used for vacuum adsorption and gas transportation in the semiconductor industry.

 

Gas Delivery: Magnetic bearing vacuum pumps provide a stable vacuum environment for semiconductor production through high-precision gas delivery systems. For example, during the vacuum adsorption process in chip manufacturing, their low vibration characteristics minimize the impact on delicate processes.

 

Clean Air Supply: Some brands use stainless steel coating technology and food-grade lubricating materials to meet the strict requirements of electronic manufacturing for gas source cleanliness and avoid impurities contaminating precision equipment.

 

Industrial Gas Boosting: In the gas supply system of semiconductor equipment, magnetic bearing turbo blowers ensure gas delivery stability through efficient boosting, supporting high-precision processes such as wafer processing and photolithography.

GF200 Flow: 120m³/min, Pressure: 78.4kPa

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